9512183 Kastner This proposal request equipment to upgrade two existing MIT facilities: (1) the Microsystems Technology Laboratory (MTL) devoted to ultraclean semiconductor processing and (2) the Microfabrication Shared Experimental Facility (MSEF) for fabricating general-purpose microstructures. The request for the MSEF facility consists of an e-beam evaporator, a thermal evaporator, a device characterization station and sputtering system, while the MTL request is for a chemical mechanical polishing (CMP) for silicon wafers and an ECR RIE plasma CVD system. ***

Project Start
Project End
Budget Start
1995-09-01
Budget End
1997-08-31
Support Year
Fiscal Year
1995
Total Cost
$343,750
Indirect Cost
Name
Massachusetts Institute of Technology
Department
Type
DUNS #
City
Cambridge
State
MA
Country
United States
Zip Code
02139