In the Phase I effort, Sandia System demonstrated the value of angle- resolved scatter measurement to many technologies which can greatly benefit from a low cost, rugged scatterometer which does not have to be the quality of laboratory grade instruments. As part of the Phase II effort, Sandia System will design and construct two prototype versions of scatterometer instruments which are both rugged and low cost. Data from our Phase I effort show this can be done using off-the-shelf components. In addition, we will continue to examine materials with the laboratory grade scatterometer used in our Phase I effort, to demonstrate applicability to other areas.
