This research by a Presidential Young Investigator deals with a theoretical description of the spin coating process. Previously available models of this important industrial process have been empirically based and are of limited utility in predicting coating performance. The present investigation is to provide a realistic and reliable model. Effects of inertia, surface tension, centrifugal forces, and viscosity will be systematically investigated. The effects of non-Newtonian fluid properties will also be included.

Project Start
Project End
Budget Start
1988-08-01
Budget End
1994-01-31
Support Year
Fiscal Year
1988
Total Cost
$158,250
Indirect Cost
Name
University of Illinois Urbana-Champaign
Department
Type
DUNS #
City
Champaign
State
IL
Country
United States
Zip Code
61820