CTS-9500067 Lin U of Cincinnati A magnetron sputtering systems will be purchased and used to fabricate inorganic membranes. The substrate temperature, substrate to target distance and deposition time can be controlled manually or automatically. Termination of the sputtering deposition at a specified film thickness is also possible. The equipment will allow the development of semi-permeable nano-structured composite membranes. Ceramic membranes will be used as the support. The new membranes will have applications in gas separations for the environmentally conscious manufacture of petrochemicals.
