Abstract

ABSTRACT CTS-9622178 Goodson REG Support was requested for a scanning probe microscope and a pulsed Nd:YVO4 laser to be used to control temperatures in manufacturing processes at very small length scales. Applications to electronic circuits, MicroElectroMechanical Machines and biomedical components are envisioned.

  Funding Agency

Agency
National Science Foundation (NSF)
Institute
Division of Chemical, Bioengineering, Environmental, and Transport Systems (CBET)
Type
Standard Grant (Standard)
Application #
9622178
Program Officer
ASHLEY F EMERY
Project Start
Project End
Budget Start
1996-05-01
Budget End
1998-04-30
Support Year
Fiscal Year
1996
Total Cost
$44,653
Indirect Cost

  Institution

Name
Stanford University
Department
Type
DUNS #
City
Palo Alto
State
CA
Country
United States
Zip Code
94304