Prof. Peter C. Searson will develop an experimental and theoretical framework to describe the electrochemical deposition of copper and gold on silicon, and to characterize the microstructure and electrical properties of the junctions. A combination of techniques will be used, primarily electrochemical analysis, electrochemical impedance spectroscopy, in situ microwave reflectivity, scanning probe microscopy, electron microscopy, and x-ray diffraction. The project will result in the determination of the mechanism of the charge transfer at the electrolyte-semiconductor interface and of the metal deposition; the kinetics of the ion reduction at the doped semiconductor surface, and of the metal nucleation and growth. Insight will be gained on the relationship between interfacial chemistry and materials properties (microstructure, morphology, and electrical properties). A scientific basis will be provided for the deposition of high quality, uniform metal films on semiconductor surfaces, with controlled Schottky or ohmic characteristics.

Project Start
Project End
Budget Start
1998-06-15
Budget End
2002-05-31
Support Year
Fiscal Year
1997
Total Cost
$250,000
Indirect Cost
Name
Johns Hopkins University
Department
Type
DUNS #
City
Baltimore
State
MD
Country
United States
Zip Code
21218