Hodges This research is on systems for instruction in and control of IC (integrated circuit) manufacturing (CIM). There are two parts: 1. The user interface. The primary thrust is developing graphical user interfaces and multimedia applications to improve manufacturing productivity and training. These include a standard desktop interface for control, scheduling, analysis and management programs. Also being developed is an engineer's notebook, and a hypermedia introduction to semiconductor manufacturing. 2. Process control and development. Research is focused on designing and prototyping object-oriented systems to support routine manufacturing applications at the equipment level. Activities include: real-time monitoring, statistical process control, fault diagnosis, the efficient development of new recipes, and the economical creation of equipment models. Experiments with real-time monitoring of applications on equipment (processing and analytical) and equipment maintenance are being done. Results are being used to create a photolithography workcell prototype.
