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New Routes to Thin Films of Metal Nitrides
Jensen, Klavs
Massachusetts Institute of Technology, Cambridge, MA, United States
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Chemistry (CHE)
Application #
9096197
Program Officer
Project Start
Project End
Budget Start
1989-08-01
Budget End
1991-07-31
Support Year
Fiscal Year
1990
Total Cost
$83,300
Indirect Cost
Institution
Name
Massachusetts Institute of Technology
Department
Type
DUNS #
City
Cambridge
State
MA
Country
United States
Zip Code
02139
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