This project, supported in the Analytical and Surface Chemistry Program, will continue Professor Marcus' research into the fundamental and practical aspects of the application of radio frequency glow discharge (rf-GD) devices for the elemental analysis of solids by atomic absorption, atomic emission, and mass spectrometries. The primary focus of the research will involve the development of new methods for the analysis of nonconducting solids, such as oxides, depth-profiling of solid materials, methods for the analysis of polymer films, and the development of glow discharge sources for the generation of metal ions for chemical ionization mass spectrometry. This research, supported in the Analytical and Surface Chemistry Program, will increase our understanding of the fundamental aspects glow discharge devices and their application as sputtering devices and metal ion generators for use with atomic and mass spectrometries for the analysis of solid materials.