This starter grant award to Occidental College will support the research of Professor Eileen M. Spain. The theme of the research is the study of transition metal chalcogenide thin films deposited by pulsed laser vaporization, which can produce high kinetic energy species. To understand the issues of film growth and nucleation with high kinetic energy species, two modern experimental techniques are employed. Film topography is measured by atomic force microscopy and the experimental parameters that produce crystalline films are determined. With single-photon ionization time-of-flight mass spectrometry, the identity, kinetic energy distribution, and relative concentration of the plasma species that affect the deposited film properties are measured. This research will advance the fundamental understanding of materials issues underlying the growth of thin films. Such films are the basis for fabrication of submicron electronic devices composed of various metal and metal-containing layers, a technology of intense interest in the microelectronics industry.
