Nanoindentation is an ultra-low load indentation technique that is widely used to probe the mechanical properties of materials of small volume. This project aims to extend our understanding of the mechanics and mechanisms of nanoindentation on a variety of small material structures, including carbon nanotube forests, thermal barrier coatings, dielectric and metallic thin films, and polymer films. Reverse analysis algorithms will be developed to extract the intrinsic mechanical properties of small material systems. The proposed research develops new and improved understanding of the microstructural mechanisms, provides new methodologies of determining the mechanical properties through simple tests, and results in better models for thin film and other small systems. The broader impacts are through the potential significance of the research effort in multi-scale modeling and implementing nanoscience and technology. In addition, the proposed research fully integrates with an education program that includes undergraduate and graduate enhancement, and the project is further bolstered by collaboration with industry and other universities.