The goal of this research is to gain a fundamental understanding of the tribological properties of nano-patterned surfaces (NPS) so as to design NPS with optimized tribological performances for micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS). A unique integrated experimental and modeling approach will be employed with matching materials and length scales for the investigation. The specific objectives are to: (1) investigate experimentally the tribological properties of NPS and their correlation to surface nanostructures, and (2) develop multiscale models to uncover the fundamental mechanisms related to the adhesion, friction, and wear of NPS. This research uniquely integrates state-of-the-art experimental techniques with advanced modeling methods to uncover the underlying mechanisms responsible for the desired tribological properties of NPS. The proposed research represents an important step toward the realization of low-adhesion and low-friction MEM/NEMS devices. This research offers abundant opportunities to train students in the emerging fields of nanotribology, multiscale modeling, and nanomanufacturing. It will improve the future competitiveness of the United States in the area of nanotechnology.
