This equipment grant is provided to purchase an optical multichannel analyzer and an Excimer Laser. The optical multichannel analyzer will be used for spectroscopic diagnostics of the laser chemical vapor deposition (LCVD) reaction to determine temperature and chemistry at the interaction point. The Excimer Laser will be used to develop a laser induced fluorescent method to determine reaction product and reactant concentration distribution and flow at the interaction region. This will provide insight into the rate of mass transport in this process.