This equipment grant is provided to purchase an optical multichannel analyzer and an Excimer Laser. The optical multichannel analyzer will be used for spectroscopic diagnostics of the laser chemical vapor deposition (LCVD) reaction to determine temperature and chemistry at the interaction point. The Excimer Laser will be used to develop a laser induced fluorescent method to determine reaction product and reactant concentration distribution and flow at the interaction region. This will provide insight into the rate of mass transport in this process.

Project Start
Project End
Budget Start
1988-06-01
Budget End
1989-11-30
Support Year
Fiscal Year
1988
Total Cost
$68,850
Indirect Cost
Name
University of Illinois Urbana-Champaign
Department
Type
DUNS #
City
Champaign
State
IL
Country
United States
Zip Code
61820