Laser Chemical Vapor Deposition (LCVD) techniques can be used to produce thin layers of materials with precise spatial control. Although this has been clearly demonstrated, little has been done to understand the fundamentals of the LCVD process. Experimental studies of the deposition mechanism for pure titanium will be conducted using optical, thermal and chemical properties. The results will be used to develop generic mathematical models for the deposition process.

Agency
National Science Foundation (NSF)
Institute
Division of Civil, Mechanical, and Manufacturing Innovation (CMMI)
Application #
8815417
Program Officer
Bruce M. Kramer
Project Start
Project End
Budget Start
1989-01-01
Budget End
1992-06-30
Support Year
Fiscal Year
1988
Total Cost
$298,000
Indirect Cost
Name
University of Illinois Urbana-Champaign
Department
Type
DUNS #
City
Champaign
State
IL
Country
United States
Zip Code
61820