This objective of this proposal is to develop a strain measurement technique of the order of light wavelength or smaller for nanomechanic research. Advances in this new discipline of nanomechanics, which relates to solid mechanics at the nanometer scale, are considered essential for achieving break-through in designing engineered materials. This proposal addresses the need for an experimental technique to measure deformations at submicrometers at cryogenic through elevated temperatures. The desired submicrometer resolution will be achieved by the use of a scanning electron microscope (SEM) which will record the motion of submicron fiducial marks on the specimen. Difficulties are envisioned in developing markers which can withstand the operating temperature. This is an Expedited Award for Novel Research.