The development of Shape Memory Effect (SME) thin films as intelligent materials for micro-switches and micro-mation actuators is proposed. SME materials as "intelligent" actuator materials are attractive compared to electrostatic actuators requiring external control. Stoichimetric NiTi is the most promising SME thin film candidate as it is a tough material with a convenient termperature transformation range of 30--60 C, and also exhibits a strong recovery force on deformation. As dopants, such as Ca, radically alter the transformation temperatures, NiTi will find applications in both micro-sensor fabricated by the author using RF sputter co-deposition onto Si and Al2O3 substrates followed by thermal snnealing. The optimal conditions and analysis by TEM and XRD. Prototypical micro-switches and actuators using these films will be fabricated using conventioal lithographic techniques.
