The award is for the Research in Undergraduate Institutions Program. The proposed work will examine the structural variations that occur in amorphous silicon nitride and silicon oxynitride films with varying levels of electrical and/or thermal stimulation. Such structural changes change the physical, chemical and electrical characteristics of semiconductor devices, including the electrical and chemical stability, threshold voltage and radiation hardness. If techniques can be developed for reducing the structural changes in silicon nitride and oxynitride films, the reliability and life of semiconductor devices may be significantly improved. In addition, the proposed research will provide opportunities for undergraduate students to develop critical skills in problem solving in the area of solid state technology and to encourage them to pursue graduate degrees. Superplastic forming is used to shape high performance alloys in aerospace applications and will find increased use in its application to the forming of titanium aluminides and other, "next generation" aerospace materials. Better understanding of the behavior of materials during superplastic forming will allow the fabrication of high performance parts at lower cost and with higher reliability.
