This research project is to develop the knowledge base required for implementing an advanced control system that more directly controls coating properties in the integrated plasma deposition processing. The primary areas of the research include: (a) developing appropriate models that yield insight into the relation of manipulatable inputs, process variables, and resulting material attributes, (b) development of appropriate sensors, control strategies and algorithms, and (c) experimental analysis to confirm models and fundamental assumptions of the control strategy. The research has a balance between theory and experimentation. This research effort will be focused on making connections to two industrial groups: that of the end-user who seek to develop new coatings, and that of the equipment vendor. While equipment vendors have not historically been leaders at developing improved control systems for plasma deposition, seeking such collaborative efforts will help promote diffusion of new technology to industry. The work is in close collaboration with industry to ensure the research is focused on issues relevant to industry and to jointly conduct experiments utilizing an industrial state-of-the-art plasma deposition facility.
