*** CMS-9713998 Panoskaltsis An interdisciplinary program will study the fabrication and mechanical properties of shape memory alloys (SMA) with emphasis on thin films. Such films have applications to microelectromechanical systems (MEMS); SMA have been shown to be the actuation method with the largest energy density when compared to other micro actuation methods. Thus, the development of rational design procedures for SMA microactuators is needed if the potential of SMA in MEMS is to be realized. To develop such a design procedure we propose the following five major tasks: Task 1: Development of measurement methods for thin film SMA. Task 2: Development of processing/property relationship for thin film SMA. Task 3: Development of constitutive relations for SMA. Task 4: Development of design tools and material data base. We seek to provide a sound mechanics base for SMA actuators MEMS devices. In addition, we seek to provide a sound materials science base relating processing parameters to SMA microstructures and SNM microstructures to mechanical behavior. Our overall aim is to develop complete design tools for the use of SMA in MEMS devices.***
