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The Use of Energetic Ions for Analysis and Modification of Surface Adsorbates on Silicon (Materials Research)
Seiberling, Lucy
University of Pennsylvania, Philadelphia, PA, United States
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Materials Research (DMR)
Application #
8617593
Program Officer
Project Start
Project End
Budget Start
1987-02-01
Budget End
1988-08-01
Support Year
Fiscal Year
1986
Total Cost
$111,300
Indirect Cost
Institution
Name
University of Pennsylvania
Department
Type
DUNS #
City
Philadelphia
State
PA
Country
United States
Zip Code
19104
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