9311724 Perez Fundamental studies of epitaxial growth of diamond films by chemical vapor deposition (CVD) will be conducted using scanning tunneling microscopy (STM) in ultrahigh vacuum (UHV), and Raman spectroscopy to determine the quality of the grown films. It is planned to study, at atomic resolution detail, the growth of epitaxial diamond films on natural diamond substrates, and the role that hydrogen plays in growth. Polycrystalline films on other substrates will also be studied. The overall objectives include the study of both the nucleation and growth of diamond films, and the role that hydrogen plays in these processes. %%% Diamond films have a large number of potential applications due to the unique chemical and physical properties of diamond. Potential applications for diamond films include protective coatings, heat sinks, optical windows, and transistors capable of operation at high temperature, for example, at the internal operating temperatures of automobile or airplane engines. This research is expected to contribute significantly to our fundamental understanding of the formation of diamond films at low temperature and pressure, and thereby to aid in the development of practical applications of this unique material. ***