Interdisciplinary (99) This project is adapting lesson plans and laboratory experiments from micro-electromechanical systems (MEMS) programs at UC Berkeley and the University of Alabama for use in a new undergraduate MEMS curriculum that targets students in physics and manufacturing engineering. The implementation of these adaptations extends existing lab-based curriculum strengths in semiconductor manufacturing to include lab-based pedagogical activities in non-silicon sensor devices and MEMS themes. Project objectives include the development of "hands-on" laboratory activities to provide MEMS design, simulation, and fabrication experience, the use of modular web-based materials to permit self-paced study of important MEMS topics to accommodate individual learning styles, and the introduction of these topics and methods into existing interdisciplinary physics and manufacturing engineering undergraduate courses. In addition the project is enhancing employment opportunities in the emerging MEMS industry by providing new skills that enhance the ability of students to transition into the growing and multi-faceted MEMS industry.
