The objective of this research is to develop next-generation optical micro-electromechanical systems (MEMS) through the use of nanostructured surfaces, leveraging their underlying compatibility to realize multifunctional hybrid micro/nano-optical devices. The result will be MEMS-based systems capable of optical performance commensurate with bulk optics, leading to new fully miniaturized high-fidelity optical imaging systems.
Intellectual merit: Optical nanostructures have emerged as a viable alternative to implement high-reflectivity and anti-reflection coatings as well as polarization control elements. A desirable characteristic of these devices is that the required optical properties can be engineered through the nanoscale structure, freeing the choice of materials (e.g. for manufacturability or compatibility). In this project, nanostructured devices using MEMS-compatible materials and manufacturing processes will be developed and integrated with a MEMS device. These multifunctional hybrid devices will be optimized for specific target applications in compact high-resolution imaging systems, and validated in applications-oriented optical microsystems.
Broader impacts: The synthesis of two rapidly advancing areas of optical technology - MEMS and nanostructures - will enable the development of high-performance, miniaturized, multifunctional optical devices. Such devices have potential applications ranging from medical imaging and environmental monitoring to consumer electronics such as cameras and display systems. This work will also offer a wealth of opportunities for the education and training of participating students in engineering research and systems development, and will include efforts to encourage undergraduate and pre-collegiate students to pursue education and careers in science and technology fields.
Summary: The overall goal of this project was to develop nanostructure-based optical components using materials and fabrication processes compatible with optical micro-electro-mechanical systems (MEMS). The specific area of focus chosen for this project is polarization-selective devices for near-infrared wavelengths, and two prototype devices were manufactured and tested. These results are an important step towards MEMS-based systems capable of optical performance commensurate with bulk optics, enabling a new generation of fully miniaturized high-fidelity optical imaging systems. Intellectual Merit: This work demonstrated two key new devices based on nanostructures, both realized using MEMS compatible materials and processes. The first device is a polarizing beam splitter, which reflects one linear polarization state while transmitting the other with high selectivity (extinction ratio). The second device is a reflective quarter-wave plate, which transforms an input linear polarization state into a circularly polarized output, operating in reflection. Both devices have a number of applications in compact imaging systems, in conjunction with MEMS devices. In addition to these prototype devices, a number of fabrication processes were developed and optimized. The design, fabrication, and characterization methods developed in this project can now be applied to the realization of other nanostructure-based polarization optical devices. Such devices have a broad range of applications, including high-performance microscopy, compact medical imaging devices, and display technologies. Broader Impacts: The synthesis of two rapidly advancing areas of optical technology—MEMS and optical nanostructures—enable the development of high-performance, miniaturized, multifunctional optical devices which are ready for integration into micro-optical systems in a wide variety of application areas. The core scientific results developed in this project have been published, including two peer-reviewed journal papers and eight conference proceedings. Over its duration, two graduate students and ten undergraduate students have been supported in part by this project. Of the five undergraduate participants who have completed their degrees as of this writing, four have gone on to pursue post-graduate education in Engineering. In addition, project staff (faculty and students) participated in a number of outreach activities, connecting with undergraduate students, middle- and high-school students, and the general public.
