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Research Initiation: Impact of Gaseous Electronics on the Plasma Processing of Materials
Tzeng, Yonhua
Auburn University, Auburn, AL, United States
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Type
Standard Grant (Standard)
Application #
8504781
Program Officer
Maria
Project Start
Project End
Budget Start
1985-06-15
Budget End
1987-11-30
Support Year
Fiscal Year
1985
Total Cost
$70,000
Indirect Cost
Institution
Name
Auburn University
Department
Type
DUNS #
City
Auburn
State
AL
Country
United States
Zip Code
36849
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