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Supplement:Dynamics of R.F. Discharges for Materials Etching
Lieberman, Michael
Lichtenberg, Allan
University of California Berkeley, Berkeley, CA, United States
Search 88 grants from Michael Lieberman
Search 12 grants from Allan Lichtenberg
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Application #
8517363
Program Officer
Lawrence S. Goldberg
Project Start
Project End
Budget Start
1986-05-15
Budget End
1989-10-31
Support Year
Fiscal Year
1985
Total Cost
$259,900
Indirect Cost
Institution
Name
University of California Berkeley
Department
Type
DUNS #
City
Berkeley
State
CA
Country
United States
Zip Code
94704
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