This equipment grant proposal is for modernization and expansion of data acquisition and analysis instruments used in the development and various applications of high-energy pulsed broadband tunable excimer lasers. Specifically, it requests funds for the purchase of a Tektronix 7912AD Transient Digitizer and a Spectralab 300 Quadrapole Mass Spectrometer. The 7912AD digitizer, which will replace a model R7912 digitizer that has been in use for the past decade, represents a significant advancement in technology and will greatly enhance the research program of the principal investigators. The quadrapole mass spectrometer would be used as a fundamental piece of equipment in a new project to study the use of excimer lasers in the processing of semiconductor devices.
