Electron beam writing capabilities are becoming increasingly important for research in a wide variety of fields. Because such electron beams can be focussed to small dimensions, they are capable of drawing lines which have widths which are a fraction of the wavelength of light; that is less than .00001 centimeters. For engineering applications, such widths are important in optical device and holographic design and will become increasingly so as the field develops further. Such e-beam writing machines are also seeing increased use in electronic and microwave device and systems design. The present proposed effort is for the purchase of such a machine, to be used as a shared facility, for applications to engineering research in emerging technologies.

Project Start
Project End
Budget Start
1987-08-15
Budget End
1988-07-31
Support Year
Fiscal Year
1987
Total Cost
$50,000
Indirect Cost
Name
University of California San Diego
Department
Type
DUNS #
City
La Jolla
State
CA
Country
United States
Zip Code
92093