The objective of this research is to create a miniature surface plasmon sensor for bioanalyte detection. This will be attempted using microfabrication techniques, similar to those used in the manufacture of integrated circuits, and those advanced in the field of microelectromechanical engineering. The research includes the development of a miniature optical system, consisting of an electrostatically controlled mirror and a photodiode array. If successful, this device will eliminate the need for a large, expensive optical bench, which is usually associated with the detection of surface plasmon resonance. The sensor also has the potential of very low cost. This project integrates micromechanical devices with optics, electronics, and chemistry, and requires a multi-disciplinary team. It is an early potential application of active mechanical elements in a micro-sensor.