This research seeks to develop a technology for IC- processed, piezoelectric, diaphragm transducers; particularly a microphone, a speaker, and an IR sensor. Characterization and modelling of the microphone will be performed, and optimum performance will be sought. Various designs and structures of the microphone will be fabricated and characterized. CAD tools for analysis, simulation, and optimization of the piezoelectric diaphragm will be developed to aid the design process, and to support generic microelectromechanical structures built on a diaphragm, a bridge or a cantilever with composite layers. The proposed IR sensor will use the pyroelectric effect of ZnO that is sitting on a very thin and large diaphragm (a few microns thick and a few millimeters square).
