Abstract

9500033 Snider A reactive ion etch system will be purchased to provide a versatile dry etch capability spurring interdisciplinary research involving several department. ***

  Funding Agency

Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Type
Standard Grant (Standard)
Application #
9500033
Program Officer
Deborah L. Crawford
Project Start
Project End
Budget Start
1995-04-01
Budget End
1996-03-31
Support Year
Fiscal Year
1995
Total Cost
$78,457
Indirect Cost

  Institution

Name
University of Notre Dame
Department
Type
DUNS #
City
Notre Dame
State
IN
Country
United States
Zip Code
46556