Abstract

9521742 Meyyappan The funds provided will be used to support travel costs incurred by graduate students attending the First Symposium on Process Control, Diagnostics and Modeling in Semiconductor Manufacturing, a symposium dedicated to recent developments in the field of micoelectronic manufacturing. ***

  Funding Agency

Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Type
Standard Grant (Standard)
Application #
9521742
Program Officer
Marvin H. White
Project Start
Project End
Budget Start
1995-04-01
Budget End
1996-03-31
Support Year
Fiscal Year
1995
Total Cost
$4,000
Indirect Cost

  Institution

Name
Electrochemical Society
Department
Type
DUNS #
City
Princeton
State
NJ
Country
United States
Zip Code
08540