Abstract

9622407 Terry This is a Research Equipment Grant for the purchase of a very high speed ellipsometer for use in plasma processing/film thickness analysis. The instrument will be used for research on the effects of reactive plasma on surfaces in reactive ion etch and plasma enhanced chemical vapor deposition environments. ***

  Funding Agency

Agency
National Science Foundation (NSF)
Institute
Division of Electrical, Communications and Cyber Systems (ECCS)
Type
Standard Grant (Standard)
Application #
9622407
Program Officer
Magdy F. Iskander
Project Start
Project End
Budget Start
1996-09-15
Budget End
1998-08-31
Support Year
Fiscal Year
1996
Total Cost
$32,340
Indirect Cost

  Institution

Name
University of Michigan Ann Arbor
Department
Type
DUNS #
City
Ann Arbor
State
MI
Country
United States
Zip Code
48109