9403606 Cross During a two-year research visit, Dr. Cross will pursue a cooperative project with Nobuo Kamehara, Inorganic Materials and Polymers Laboratory, Fujitsu Corporation, to prepare and evaluate the electrical properties of new ferroelectric materials. Their research will focus on producing thin films of various ferroelectric materials on different substrates and developing empirical models of the ferroelectric material properties. Because of their superior conductive properties, ferroelectric materials are being studied by electronic manufacturers with the hopes of using them to further reduce the size of semiconductor devices. Although ferroelectric materials exhibit excellent properties in their bulk crystalline form, reproducing the bulk properties in thin films has been extremely difficult. Regardless of the technique, producing a homogeneous chemical composition throughout the film is difficult. Cross and Kamehara will design a matrix of thin film samples using a wide range of quantitative and qualitative variables: chemical composition, electrodes, sputtering targets, pressure, temperature, power density, etc. After different ferroelectric materials are deposited on various substrates, the team will measure the electrical properties of the materials and use that data as a basis for developing empirical models. The team then plans to test their empirical models on piezoelectric materials and finally to use their models to design future semiconductor devices. ***

Project Start
Project End
Budget Start
1994-06-01
Budget End
1998-05-31
Support Year
Fiscal Year
1994
Total Cost
$122,214
Indirect Cost
Name
Individual Award
Department
Type
DUNS #
City
Baltimore
State
MD
Country
United States
Zip Code
21201