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SBIR: Novel All-Dry Organosilicon Lithographic Resist
Goldberg, Gershon
Imet Corporation, Lincoln Center, MA, United States
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Abstract
Funding Agency
Agency
National Science Foundation (NSF)
Institute
Division of Industrial Innovation and Partnerships (IIP)
Type
Standard Grant (Standard)
Application #
8521257
Program Officer
Ritchie B. Coryell
Project Start
Project End
Budget Start
1986-05-15
Budget End
1988-10-31
Support Year
Fiscal Year
1985
Total Cost
$189,965
Indirect Cost
Institution
Name
Imet Corporation
Department
Type
DUNS #
City
Lincoln Center
State
MA
Country
United States
Zip Code
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