This SBIR Phase I Award emphasizes research on processing of single mode waveguides in aluminum gallium nitride and measurement of the electro-optical properties of these materials. The waveguides will be deposited using low pressure metalorganic chemical vapor deposition and characterized using computer controlled test facilities for electrical resistivity, thickness and chemical composition (sputter Auger), optical losses (prism coupling technique). Due to its large band gap, aluminum gallium nitride has potential for application as solar-blind ultraviolet detectors and ultraviolet filters, solid state laser scanners, and thin film miniature ultraviolet spectrometers.
