Multilayer coatings vastly improve the performance of most x-ray optical elements and allow operation at angles and wavelengths otherwise inaccessible. They have been used successfully in analytical instruments, astronomical telescopes on satellites, and in plasma diagnostic instruments, and will likely be an important component of x-ray microlithography exposure systems in the semiconductor industry. Multilayers made by conventional techniques are not as reflective as theory predicts. They do not reflect the short wavelength x-rays of interest in medicine and nondestructive testing. To solve these problems, we propose the fabrication of multilayers by using atomic layer epitaxy to produce thinner layers with smoother, more abrupt interfaces than can be made by traditional methods.

Agency
National Science Foundation (NSF)
Institute
Division of Industrial Innovation and Partnerships (IIP)
Type
Standard Grant (Standard)
Application #
8860986
Program Officer
Darryl G. Gorman
Project Start
Project End
Budget Start
1989-01-01
Budget End
1989-09-30
Support Year
Fiscal Year
1988
Total Cost
$49,768
Indirect Cost
Name
Multilayer Optics and X-Ray Technology Inc
Department
Type
DUNS #
City
Provo
State
UT
Country
United States
Zip Code
84602