Conventional chemical vapor deposition (CVD) processing of BaTiO3 thin films requires temperatures that are incompatible with standard silicon processing technology. Photo-enhanced CVD has not been attempted for BaTiO3 and has significant potential for solving both the non-uniformity and temperature problems. The feasibility of the photo-CVD deposition of BaTiO3 will be determined. Key to this study will be a novel approach to the generation of atomic oxygen and its study by on-line mass spectrometry which will lead to enhanced understanding of the role of atomic oxygen in the formation of perovskite ferroelectrics. These techniques have potential for commercialization of both precursors and equipment for dielectric thin film fabrication for use in the electronics industry.
