A major limitation to the realization of the wide range of applications of microdevice technologies is the lack of a suitable thin film material. Absence of internal stress, high hardness and low coefficient of friction are some of the many characteristics required for an ideal thin film material. All the materials experimented with, to date, show major limitations. The unique combination of properties of diamond like nanocomposite materials make them excellent candidates for the synthesis of microdevices. The use of these coating is expected to provide a major step in the advancement of microdevice technology. The fabrication of microsensors based on these coatings will also render them biocompatible. Further, the potential resolution of the microflow sensor suggested in this proposal is several orders of magnitude better that achieved with presently available sensors.
