This Small Business Technology Transfer (STTR) Phase I research project will develop a parts-per-billion (ppb) moisture concentration sensing instrument based on a ring down cavity (RDC) spectroscopy technique. Commercial application includes characterizing the purity of a variety of gases used in the manufacture of semiconductors.

Agency
National Science Foundation (NSF)
Institute
Division of Industrial Innovation and Partnerships (IIP)
Type
Standard Grant (Standard)
Application #
9413629
Program Officer
Darryl G. Gorman
Project Start
Project End
Budget Start
1994-08-15
Budget End
1995-07-31
Support Year
Fiscal Year
1994
Total Cost
$99,681
Indirect Cost
Name
Sensors Unlimited, Inc
Department
Type
DUNS #
City
Princeton
State
NJ
Country
United States
Zip Code
08540