ABSTRACT EEC-9614219 Naylor Microfabrication research is opening up new areas for specialized thrusts. One such thrust is microfluidics which can be applied to miniature chemical analysis systems, micro-hydraulic actuators, precision fluid dispensing systems and microfluidic component manufacturers. Research in this area will expand the technological base for many possible applications. This planning grant will fund an industry/university meeting to determine the economic viability of forming an Industry/University Cooperative Research Center for Microfluidics at the University of Illinois at Chicago. The research agenda proposed for consideration in the envisioned Center encompasses: 1) Packaging for microfluidics devices; 2) Integration of microfluidic devices with sensors; 3) Thru-wafer interconnects; 4) Microfluidic cooling devices in miniature high power devices; 5) Design and modeling of microfluidic components: micropumps and microvalves; 6) Miniature drug delivery systems; 7) Miniature chemical analysis systems; 8) Fundamental studies of anisotropic etching for microfluidic components; 9) Optical monitoring and diagnostics for miniature fluidic devices; 10) Magneto hydrodynamic micropumps and solder dispensing with microfluidic devices; 11) Microhydraulic power systems; 12) Miniature NMR instruments.