This Small Business Innovation Research Phase I project from Mini-Surgery, Incorporated proposes the development of a Micro-ElectroMechnical System ("MEMS") flexural microhydraulic actuator with significant performance and cost advantages. The MEMS-based actuator design enables the use of low-cost large-batch planar manufacturing techniques such as thin film deposition and etching, lapping, and polishing for production from centimeter-scale to sub-millimeter scale. At the millimeter-to-centimeter scale, these devices could be produced at orders of magnitude lower cost than conventional hydraulic actuators. The proposed design for a novel, miniature, lightweight, low maintenance actuator offers superior reliability, speed, and force compared to conventional actuators and micromotors. The actuator is targeted for valves, pumps, compressors, electric motors, and sensors in many medical, automotive, aerospace, and industrial devices.
