This Small Business Innovation Research Phase I project from Intelligent Fiber Optic Systems will develop fiber-optic, magnetic field sensor systems employing a novel sensor probe technology, proprietary demultiplexing and signal processing techniques, and compact systems packaging, to provide real-time process control in semiconductor manufacturing. An expandable two-sensor system will be demonstrated in this Phase I activity. The company will develop and implement this system based on new fiber-optic magnetic field sensor probes, new fiber components enabling optical demultiplexing subsystems with improved signal to noise ratios, and novel demultiplexing subsystems which accurately measure very small changes in sensed information.
