9222487 Reisman The Solid State Division of the Department of Electrical and Computer Engineering at North Carolina State University, the Center for Microelectronics at the MCNC, and the British Oxygen Company will conduct a coordinated research program dealing with the science assciated with the deposition of germanoborophosphosilicate glass (or oxides) to form nanostructure composites using LPCVD and PECVD. ***
