This research seeks to develop and calibrate new microelectronic temperature measurement devices and test sections for basic heat transfer studies. Using monolithic circuit technology, arrays of temperature sensors will be developed to determine the temperature fields on the integrated heat source. The devices to be investigated will include thin and thick film (metallic) resistors, diffused resistors, diodes, bipolar transistors, junction field-effect transistors, and metal oxide semiconductor field-effect transistors. Bipolar and MOS analog circuit techniques and signal conditioning circuitry will be explored. Traditional large scale thermometers such as thermocouples can interfere with the thermal field being investigated. In addition, the underlining microscale phenomena cannot be quantified. This research program will develop the sensors to measure the temperature on the scale of a few micrometers. Since the associated boundary conditions become very important at these scales, the research will also investigate the integration of these temperature sensors with heat sources.
