Abstract

Abstract 9512360 Gabitto This proposal is for funds to develop a chemical vapor deposition facility to investigate the deposition of silicon thin films. The objective of the proposed research is to build a diagnostic experimental apparatus to study plasma and photo CVD. This proposal requests funds for a CVD reactor system.

  Funding Agency

Agency
National Science Foundation (NSF)
Institute
Division of Chemical, Bioengineering, Environmental, and Transport Systems (CBET)
Type
Standard Grant (Standard)
Application #
9512360
Program Officer
Farley Fisher
Project Start
Project End
Budget Start
1995-09-01
Budget End
1997-08-31
Support Year
Fiscal Year
1995
Total Cost
$50,000
Indirect Cost

  Institution

Name
Prairie View A&M Research Foundation
Department
Type
DUNS #
City
Prairie View
State
TX
Country
United States
Zip Code
77446