ABSTRACT The principal investigators propose to conduct a series of experiments to study heat transfer and fluid flow in channels that are of micrometer dimensions. Micro channels will be fabricated at the Center for Thin Film and Interface Research located at the principal investigators' institution. Microscale pressure and temperature sensors that are required for the experiments will be also be fabricated by the same facility. Various gases will be used in the study. The experiments are designed to determine the effects of surface roughness, channel geometry, and rarefication on the friction factor and heat transfer performance.