This project conducts enabling research on virtual prototyping tools for collaborative design, construction, and startup of semiconductor manufacturing facilities. This extends and integrates ongoing research within the Center for Integrated Facilities Engineering and the Center for Integrated Systems at Stanford. The focus is not on design of actual projects or processes, but on the implementation and startup of the factory building and support systems of the manufacturing enterprise. Research is being performed in collaboration with Intel, which is providing specifications and is guiding testing of theory and software. The resulting tools will radically shorten the time to bring new semiconductor facilities on-line.