This renewal grant, funded jointly by the Special Projects and Inorganic Chemistry programs, provides for the support of Professors O'Neal, Ring and Tong at San Diego State University, a predominantely undergraduate institution. The research is directed at providing fundamental kinetic data for the decomposition of chlorinated silanes, which is the basis for the production of epitaxial silicon films, useful in the production of microelectronic devices. The Principal Investigators propose kinetic techniques which circumvent handling difficulties of chlorosilanes by integrating two laser-based techniques: Laser Powered Homogeneous Pyrolysis to induce reaction under wall-less conditions, and Laser Excited Fluoresence to monitor in-situ the reactions of the intermediates produced in the pyrolysis. Downstream chromatographic and mass spectroscopic analysis of the product gases will provide complete kinetic and thermodynamic data. Three co-principal investigators with complementary backgrounds applicable to the proposed research (gas phase kinetics and thermodynamics, inorganic synthesis and mechanisms and laser diagnostics and spectroscopy) will collaborate in directing this integrated research program. Two undergraduate students will participate in the research.
