This research is in the general area of analytical and surface chemistry and in the subfields of atomic spectroscopy and mass spectroscopy. The goal of this research is to develop and evaluate radio frequency (RF) powered glow discharge as an atomization/excitation/ionization source for direct solids elemental analysis. This approach in combination with mass spectrometric and atomic emission detection should allow for direct analysis of insulating materials such as glasses and ceramics. This research focuses on examining the analytical utility of this approach, particularly for the analysis of insulating materials. This research involves the use of a new method of direct solid analysis. A new type of sampling source, which is modulated at radio frequency, is to be used for direct sampling. This research should provide a new and improved approach to the analysis of materials such as glasses and ceramics.