An exploratory study will be conducted into the dynamics of air flow in the microelectronics clean room as it interacts with the process automation equipment to determine if this approach can eventually lead to improved clean room design with a high level of contamination control. This study will examine fluid dynamics of clean room operations, including the consideration of robots as a source of contamination and the effect of robot movement and work station design on the aerosol dispersion in the clean room. Development of a simulation computer program of robots and end effectors as particle generators is planned, as well as a simulation program of a clean room with graphic output showing three-dimensional particle concentration in the room.
